Yes. A smaller scale makes it worse, a larger scale makes it better.
If you reduce things enough, everything will become so blurred that you won't be able to see anything (that's why we can't photograph atoms using visible light), and if you make things large enough your camera will become the bottleneck so a very small amount of blur is added to any object, whatever the size.
Ah I see, when you say "photo" you are referring to the photolithography used in the chip making and not the captured photo of the finished chip is that correct?
I mean the captured photography of the chip. Most of the time it is not done with ultraviolet light or electron microscopes, just with normal visible light cameras ans some very good lenses.
Yes. A smaller scale makes it worse, a larger scale makes it better.
If you reduce things enough, everything will become so blurred that you won't be able to see anything (that's why we can't photograph atoms using visible light), and if you make things large enough your camera will become the bottleneck so a very small amount of blur is added to any object, whatever the size.